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DOI | 10.1016/j.sna.2012.12.026 |
Microfabricated air-microfluidic sensor for personal monitoring of airborne particulate matter: Design, fabrication, and experimental results | |
Paprotny, Igor1,2; Doering, Frederick1; Solomon, Paul A.3; White, Richard M.1; Gundel, Lara A.2 | |
发表日期 | 2013-10-01 |
ISSN | 0924-4247 |
卷号 | 201页码:506-516 |
英文摘要 | We present the design and fabrication of a micro electro mechanical systems (MEMS) air-microfluidic particulate matter (PM) sensor, and show experimental results obtained from exposing the sensor to concentrations of tobacco smoke and diesel exhaust, two commonly occurring PM sources. Our sensor measures only 25 mm x 21 mm x 2 mm in size and is two orders of magnitude smaller than commercially available direct mass PM sensors. The small shape allows our sensor to be used for continuous recording of personal PM exposure levels. The sensor contains an air-microfluidic circuit that separates the particles by size (virtual impactor) and then transports and deposits the selected particles using thermophoretic precipitation onto the surface of a microfabricated mass-sensitive film bulk acoustic resonator (FBAR). The mass-loading of the FBAR causes a change in its resonant frequency, and the rate of the frequency change corresponds to the particle concentration in the sampled air volume. We present experimental results that demonstrate the performance of our sensor for measuring PM mass emitted from diesel exhaust and tobacco smoke, and show that it exhibits sensitivity approaching 2 mu g/m(3) with up to 10 min integration time. (C) 2012 Elsevier B.V. All rights reserved. |
英文关键词 | Air quality monitoring;PM2.5;Air-microfluidics;MEMS |
语种 | 英语 |
WOS记录号 | WOS:000325836400064 |
来源期刊 | SENSORS AND ACTUATORS A-PHYSICAL
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来源机构 | 美国环保署 |
文献类型 | 期刊论文 |
条目标识符 | http://gcip.llas.ac.cn/handle/2XKMVOVA/59639 |
作者单位 | 1.Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA; 2.Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Environm Energy Technol Div, Berkeley, CA 94720 USA; 3.US EPA, Off Res & Dev, Las Vegas, NV 89193 USA |
推荐引用方式 GB/T 7714 | Paprotny, Igor,Doering, Frederick,Solomon, Paul A.,et al. Microfabricated air-microfluidic sensor for personal monitoring of airborne particulate matter: Design, fabrication, and experimental results[J]. 美国环保署,2013,201:506-516. |
APA | Paprotny, Igor,Doering, Frederick,Solomon, Paul A.,White, Richard M.,&Gundel, Lara A..(2013).Microfabricated air-microfluidic sensor for personal monitoring of airborne particulate matter: Design, fabrication, and experimental results.SENSORS AND ACTUATORS A-PHYSICAL,201,506-516. |
MLA | Paprotny, Igor,et al."Microfabricated air-microfluidic sensor for personal monitoring of airborne particulate matter: Design, fabrication, and experimental results".SENSORS AND ACTUATORS A-PHYSICAL 201(2013):506-516. |
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